一种具有集中引线的集成温度补偿柔性剪应力传感器微阵列。

An integrated temperature-compensated flexible shear-stress sensor microarray with concentrated leading-wire.

作者信息

Tang Jian, Liu Wu, Zhang Weiping, Sun Yongming, Chen Honghai

机构信息

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.

出版信息

Rev Sci Instrum. 2016 Feb;87(2):025001. doi: 10.1063/1.4941067.

DOI:10.1063/1.4941067

PMID:26931882

Abstract

Flexible shear stress sensor is quite important for characterizing curved surface flows. In this work, a novel integrated shear stress sensor microarray is designed with twenty parallel channels, which share the concentrated leading-wire to transmit the ground signal. Electrical pads in rows are easily connected to the circuits with two separate Wheatstone bridges and constant-temperature-difference mode operation is provided for the hot-wires. Temperature crosstalk between adjacent hot-wires is prevented well and the effectiveness of the temperature compensated circuits is verified. Relatively large output response is obtained as the shear stress varies and the sensitivity of the sensors is measured about 0.086 V(2)/Pa(1/3) with nonlinearity lower than 1%, revealing high performance characteristic of the sensors.

摘要

柔性剪切应力传感器对于表征曲面流动非常重要。在这项工作中，设计了一种新型集成剪切应力传感器微阵列，它具有二十个平行通道，这些通道共享集中引线来传输接地信号。行中的电垫可通过两个独立的惠斯通电桥轻松连接到电路，并为热线提供恒温差模式操作。相邻热线之间的温度串扰得到了很好的抑制，并且验证了温度补偿电路的有效性。随着剪切应力的变化，获得了相对较大的输出响应，传感器的灵敏度测量值约为0.086 V(2)/Pa(1/3)，非线性低于1%，显示出传感器的高性能特性。