传感器尺寸对柔性热膜剪应力传感器性能的影响

The Effect of Sensor Dimensions on the Performance of Flexible Hot Film Shear Stress Sensors.

作者信息

Wang Jin-Jin, Hu Hong, Chen Chao-Zhan

机构信息

School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen, Guangdong 518055, China.

出版信息

Micromachines (Basel). 2019 May 6;10(5):305. doi: 10.3390/mi10050305.

DOI:10.3390/mi10050305

PMID:31064144

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6562575/

Abstract

This paper presents a study to determine the effect of sensor dimensions (length, width, and thickness) on the performance of flexible hot film shear stress sensors. The sensing component of a hot film sensor is nickel thermistor, and the flexible substrate material is polyimide. Several groups of flexible hot film shear stress sensors with different lengths, widths, and thicknesses were studied. The temperature coefficient of resistance (TCR) was measured. The TCR increased slightly with increasing thickness. The frequency response (time constant) of the flexible hot film shear stress sensor was obtained by the square wave, while the sensitivity was tested in a wind tunnel. The study found that as the sensor length was shortened, the frequency response increased, and the sensitivity decreased.

摘要

本文介绍了一项旨在确定传感器尺寸（长度、宽度和厚度）对柔性热膜剪应力传感器性能影响的研究。热膜传感器的传感元件是镍热敏电阻，柔性基底材料是聚酰亚胺。研究了几组具有不同长度、宽度和厚度的柔性热膜剪应力传感器。测量了电阻温度系数（TCR）。TCR随厚度增加略有增大。通过方波获得柔性热膜剪应力传感器的频率响应（时间常数），同时在风洞中测试了灵敏度。研究发现，随着传感器长度缩短，频率响应增加，而灵敏度降低。