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用于非球面检测的改进型相位测量偏折术。

Improved phase-measuring deflectometry for aspheric surfaces test.

作者信息

Guo Chunfeng, Lin Xiaoyan, Hu Anduo, Zou Jun

出版信息

Appl Opt. 2016 Mar 10;55(8):2059-64. doi: 10.1364/AO.55.002059.

Abstract

An improved phase-measuring deflectometry (PMD) is presented for the aspheric surfaces test. We explore this method from the Ronchi test in a reverse way. With this concept, a camera aperture is placed near the center of curvature of the test mirror, and fringes are displayed on a liquid crystal display screen. The fringes reflected off the test mirror are observed by the camera. By analyzing the captured fringes, the deviations of the test mirror from its ideal shape are obtained and the aspheric surface under test is reconstructed. Compared with traditional PMD, this method needs only to determine reflected rays and doesn't need to know the corresponding incident rays by calibrations, moving screen, or approximation. Both a computer simulation and preliminary experiment have been carried out to demonstrate the validity of the improved PMD. This improved PMD provides a new tool to measure aspheric surfaces quantitatively in full field for optical manufacturing.

摘要

提出了一种用于非球面检测的改进型相位测量偏折术(PMD)。我们以逆向方式从朗奇测试出发探索该方法。基于此概念,将相机孔径放置在测试镜曲率中心附近,并在液晶显示屏上显示条纹。相机观察从测试镜反射的条纹。通过分析捕获的条纹,获得测试镜相对于其理想形状的偏差,并重建被测非球面。与传统的PMD相比,该方法仅需确定反射光线,无需通过校准、移动屏幕或近似来了解相应的入射光线。进行了计算机模拟和初步实验以证明改进型PMD的有效性。这种改进型PMD为光学制造中全视场定量测量非球面提供了一种新工具。

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