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采用石墨烯作为原子级薄缓冲层在 Si 上垂直生长 GaN 纳米棒。

Vertically Oriented Growth of GaN Nanorods on Si Using Graphene as an Atomically Thin Buffer Layer.

机构信息

Max Planck Institute for the Science of Light , Günther-Scharowsky-Str. 1, D-91058 Erlangen, Germany.

CrayoNano AS , Otto Nielsens vei 12, NO-7052 Trondheim, Norway.

出版信息

Nano Lett. 2016 Jun 8;16(6):3524-32. doi: 10.1021/acs.nanolett.6b00484. Epub 2016 May 3.

Abstract

The monolithic integration of wurtzite GaN on Si via metal-organic vapor phase epitaxy is strongly hampered by lattice and thermal mismatch as well as meltback etching. This study presents single-layer graphene as an atomically thin buffer layer for c-axis-oriented growth of vertically aligned GaN nanorods mediated by nanometer-sized AlGaN nucleation islands. Nanostructures of similar morphology are demonstrated on graphene-covered Si(111) as well as Si(100). High crystal and optical quality of the nanorods are evidenced through scanning transmission electron microscopy, micro-Raman, and cathodoluminescence measurements supported by finite-difference time-domain simulations. Current-voltage characteristics revealed high vertical conduction of the as-grown GaN nanorods through the Si substrates. These findings are substantial to advance the integration of GaN-based devices on any substrates of choice that sustains the GaN growth temperatures, thereby permitting novel designs of GaN-based heterojunction device concepts.

摘要

通过金属有机气相外延在 Si 上实现纤锌矿 GaN 的整体集成受到晶格和热失配以及回熔蚀刻的严重阻碍。本研究提出了单层石墨烯作为原子薄的缓冲层,用于通过纳米级 AlGaN 形核岛介导的垂直排列 GaN 纳米棒的 c 轴取向生长。在石墨烯覆盖的 Si(111)和 Si(100)上也证明了具有相似形态的纳米结构。通过扫描透射电子显微镜、微拉曼和阴极发光测量以及有限差分时域模拟的支持,证明了纳米棒具有高晶体和光学质量。电流-电压特性显示出通过 Si 衬底的生长 GaN 纳米棒的高垂直传导。这些发现对于在任何支持 GaN 生长温度的所选衬底上推进 GaN 基器件的集成具有重要意义,从而允许 GaN 基异质结器件概念的新设计。

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