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通过原子层沉积ZrO2层和热退火增强ZnO纳米线阵列的光致发光

Photoluminescence enhancement of ZnO nanowire arrays by atomic layer deposition of ZrO2 layers and thermal annealing.

作者信息

Zhang Yuan, Lu Hong-Liang, Wang Tao, Ren Qing-Hua, Chen Hong-Yan, Zhang Hao, Ji Xin-Ming, Liu Wen-Jun, Ding Shi-Jin, Zhang David Wei

机构信息

State Key Laboratory of ASIC and System, Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, Shanghai 200433, China.

出版信息

Phys Chem Chem Phys. 2016 Jun 28;18(24):16377-85. doi: 10.1039/c6cp01900e. Epub 2016 Jun 6.

Abstract

The effects of shell thickness and rapid thermal annealing on photoluminescence properties of one-dimensional ZnO/ZrO2 core/shell nanowires (NWs) are studied in this work. The ZnO/ZrO2 core/shell structures were synthesized by coating thin ZrO2 layers on the surface of ZnO NWs using atomic layer deposition. The morphological and structural characterization studies reveal that the ZrO2 shells have a polycrystalline structure, which are uniformly and conformally coated on the high quality single-crystal ZnO NWs. As compared with bare ZnO NWs, the ZnO/ZrO2 core/shell structures show a remarkable and continuous enhancement of ultraviolet (UV) emission in intensity with increasing ZrO2 shell thickness up to 10 nm. The great improvement mechanism of the UV emission arises from the surface passivation and the efficient carrier confinement effect of the type-I core/shell system. Moreover, it is observed that the UV emission of ZnO/ZrO2 core/shell structures after thermal annealing increases with increasing annealing temperature. The dominant surface exciton (SX) emission in the bare ZnO NWs and the ZnO/ZrO2 core/shell nanostructures has been detected in the low temperature photoluminescence spectra. A blue shift of the NBE emission peak as well as the varied decay rate of the SX emission intensity are also found in the ZnO NWs after the growth of ZrO2 shells and further thermal treatment. Our results suggest that the ZnO/ZrO2 core/shell nanostructures could be widely implemented in the optical and electronic devices in the future.

摘要

本文研究了壳层厚度和快速热退火对一维ZnO/ZrO₂ 核壳纳米线(NWs)光致发光特性的影响。采用原子层沉积法在ZnO NWs表面包覆ZrO₂ 薄层,合成了ZnO/ZrO₂ 核壳结构。形态学和结构表征研究表明,ZrO₂ 壳层具有多晶结构,均匀且保形地包覆在高质量的单晶ZnO NWs上。与裸露的ZnO NWs相比,随着ZrO₂ 壳层厚度增加至10 nm,ZnO/ZrO₂ 核壳结构的紫外(UV)发射强度显著且持续增强。UV发射的显著改善机制源于I型核壳系统的表面钝化和有效的载流子限制效应。此外,观察到热退火后ZnO/ZrO₂ 核壳结构的UV发射随退火温度升高而增加。在低温光致发光光谱中检测到了裸露的ZnO NWs以及ZnO/ZrO₂ 核壳纳米结构中的主要表面激子(SX)发射。在生长ZrO₂ 壳层并进一步热处理后,ZnO NWs中还发现了近带边发射峰的蓝移以及SX发射强度的衰减率变化。我们的结果表明,ZnO/ZrO₂ 核壳纳米结构未来可能在光学和电子器件中得到广泛应用。

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