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通过纳米模板光刻在模板剥离金属金字塔上实现的自对准光栅耦合器。

Self-aligned grating couplers on template-stripped metal pyramids via nanostencil lithography.

作者信息

Klemme Daniel J, Johnson Timothy W, Mohr Daniel A, Oh Sang-Hyun

机构信息

Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, USA.

出版信息

Appl Phys Lett. 2016 May 23;108(21):213106. doi: 10.1063/1.4951673. Epub 2016 May 25.

Abstract

We combine nanostencil lithography and template stripping to create self-aligned patterns about the apex of ultrasmooth metal pyramids with high throughput. Three-dimensional patterns such as spiral and asymmetric linear gratings, which can couple incident light into a hot spot at the tip, are presented as examples of this fabrication method. Computer simulations demonstrate that spiral and linear diffraction grating patterns are both effective at coupling light to the tip. The self-aligned stencil lithography technique can be useful for integrating plasmonic couplers with sharp metallic tips for applications such as near-field optical spectroscopy, tip-based optical trapping, plasmonic sensing, and heat-assisted magnetic recording.

摘要

我们将纳米模板光刻技术与模板剥离技术相结合,以高通量方式在超光滑金属金字塔顶端创建自对准图案。作为这种制造方法的示例,展示了诸如螺旋和非对称线性光栅等三维图案,这些图案可将入射光耦合到尖端的热点。计算机模拟表明,螺旋和线性衍射光栅图案在将光耦合到尖端方面均有效。这种自对准模板光刻技术可用于将等离子体耦合器与尖锐金属尖端集成,以用于诸如近场光学光谱、基于尖端的光阱、等离子体传感和热辅助磁记录等应用。

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本文引用的文献

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Engineering metallic nanostructures for plasmonics and nanophotonics.工程金属纳米结构用于等离子体学和纳米光子学。
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Three-dimensional plasmonic nanofocusing.三维等离子体纳米聚焦。
Nano Lett. 2010 Apr 14;10(4):1369-73. doi: 10.1021/nl904294u.

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