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用于提高平均功率均匀性和扩大扫描区域的激光振镜扫描系统。

Laser galvanometric scanning system for improved average power uniformity and larger scanning area.

作者信息

Yang Pei-Ming, Lo Yu-Lung, Chang Yuan-Hao

出版信息

Appl Opt. 2016 Jul 1;55(19):5001-7. doi: 10.1364/AO.55.005001.

Abstract

A new laser galvanometric scanning optical system incorporating a dynamic-tilt focusing lens is proposed to improve the laser spot performance in adaptive manufacturing applications. The simulations focus specifically on the laser spot size, the spot profile, the spot position, the spot energy distribution, and the size of the scanning working field. It is shown that for a designed spot size of 50 μm, the proposed system achieves an average spot size of 50.5 μm. Moreover, the maximum position deviation of the laser beam is reduced from (x=-3.02%, y=1.30%) in a traditional scanning system to (x=-0.055%, y=0.162%) in the proposed system. Finally, the maximum working field area is increased by around 240% compared to that of a traditional system. Overall, the results show that the proposed laser galvanometric scanning system achieves a small spot size, a symmetrical and round spot profile, a uniform spot energy distribution, and a large working area. As a result, it is ideally suited to rapid prototyping applications.

摘要

为了改善自适应制造应用中的激光光斑性能,提出了一种新的包含动态倾斜聚焦透镜的激光振镜扫描光学系统。模拟具体聚焦于激光光斑尺寸、光斑轮廓、光斑位置、光斑能量分布以及扫描工作场的大小。结果表明,对于设计光斑尺寸为50μm的情况,所提出的系统实现了平均光斑尺寸为50.5μm。此外,激光束的最大位置偏差从传统扫描系统中的(x = -3.02%,y = 1.30%)降低到所提出系统中的(x = -0.055%,y = 0.162%)。最后,与传统系统相比,最大工作场面积增加了约240%。总体而言,结果表明所提出的激光振镜扫描系统实现了小光斑尺寸、对称且圆形的光斑轮廓、均匀的光斑能量分布以及大工作区域。因此,它非常适合快速成型应用。

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