Zhu Cong, Chu Xiangcheng, Yuan Songmei, Zhong Zuojin, Zhao Yanqiang, Gao Shuning
Beijing Engineering Technological Research Center of High-efficient & Green CNC Machining Process and Equipment, School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.
State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, Tsinghua University, Beijing 100084, China.
Ultrasonics. 2016 Dec;72:66-72. doi: 10.1016/j.ultras.2016.07.010. Epub 2016 Jul 19.
This paper presents a novel linear piezoelectric motor which is suitable for rapid ultra-precision positioning. The finite element analysis (FEA) was applied for optimal design and further analysis, then experiments were conducted to investigate its performance. By changing the input signal, the proposed motor was found capable of working in the fast driving mode as well as in the precision positioning mode. When working in the fast driving mode, the motor acts as an ultrasonic motor with maximum no-load speed up to 181.2mm/s and maximum thrust of 1.7N at 200Vp-p. Also, when working in precision positioning mode, the motor can be regarded as a flexible hinge piezoelectric actuator with arbitrary motion in the range of 8μm. The measurable minimum output displacement was found to be 0.08μm, but theoretically, can be even smaller. More importantly, the motor can be quickly and accurately positioned in a large stroke.
本文提出了一种适用于快速超精密定位的新型线性压电电机。采用有限元分析（FEA）进行优化设计和进一步分析，然后进行实验研究其性能。通过改变输入信号，发现所提出的电机能够在快速驱动模式以及精密定位模式下工作。在快速驱动模式下工作时，该电机作为超声电机，在200Vp-p电压下最大空载速度可达181.2mm/s，最大推力为1.7N。此外，在精密定位模式下工作时，该电机可视为柔性铰链压电致动器，在8μm范围内可进行任意运动。测得的最小输出位移为0.08μm，但理论上甚至可以更小。更重要的是，该电机能够在大行程内快速、精确地定位。
