Zhang Lan, Lu Jian, Takei Ryohei, Makimoto Natsumi, Itoh Toshihiro, Kobayashi Takeshi
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan.
Rev Sci Instrum. 2016 Aug;87(8):085005. doi: 10.1063/1.4960959.
We have developed a Si-based microelectromechanical systems sensor with high sensitivity for specific low-frequency vibration-sensing and energy-harvesting applications. The low-frequency vibration sensor contains a disk proof mass attached to two or three lead zirconate titanate (PZT) S-shape spring flexures. To obtain a faster and less expensive prototype, the design and optimization of the sensor structure are studied via finite-element method analysis. To validate the sensor structure to detect low-frequency vibration, the effects of geometrical dimensions, including the width and diameter of the S-shape spring of the proof mass, were analyzed and measured. The functional features, including the mechanical property and electrical performance of the vibration sensor, were evaluated. The results demonstrated that a very low resonant frequency of <11 Hz and a reasonably high voltage output of 7.5 mV at acceleration of >0.2g can be typically achieved. Given a low-frequency vibration sensor with ideal performance and mass fabrication, many advanced civilian and industrial applications can be possibly realized.
