Hattori Yoshiaki, Taniguchi Takashi, Watanabe Kenji, Nagashio Kosuke
Department of Materials Engineering, The University of Tokyo , Tokyo 113-8656, Japan.
National Institute of Materials Science , Ibaraki 305-0044, Japan.
ACS Appl Mater Interfaces. 2016 Oct 19;8(41):27877-27884. doi: 10.1021/acsami.6b06425. Epub 2016 Oct 11.
Dielectric breakdown has historically been of great interest from the perspectives of fundamental physics and electrical reliability. However, to date, the anisotropy in the dielectric breakdown has not been discussed. Here, we report an anisotropic dielectric breakdown strength (E) for h-BN, which is used as an ideal substrate for two-dimensional (2D) material devices. Under a well-controlled relative humidity, E values in the directions both normal and parallel to the c axis (E and E) were measured to be 3 and 12 MV/cm, respectively. When the crystal structure is changed from sp of cubic-BN (c-BN) to sp of h-BN, E for h-BN becomes smaller than that for c-BN, while E for h-BN drastically increases. Therefore, h-BN can possess a relatively high E concentrated only in the direction parallel to the c axis by conceding a weak bonding direction in the highly anisotropic crystal structure. This explains why the E for h-BN is higher than that for diamond. Moreover, the presented E value obtained from the high quality bulk h-BN crystal can be regarded as the standard for qualifying the crystallinity of h-BN layers grown via chemical vapor deposition for future electronic applications.
从基础物理学和电气可靠性的角度来看,介电击穿一直以来都备受关注。然而,迄今为止,尚未有人讨论过介电击穿中的各向异性。在此,我们报告了用作二维(2D)材料器件理想衬底的h-BN的各向异性介电击穿强度(E)。在良好控制的相对湿度下,垂直于和平行于c轴方向的E值(E⊥和E∥)分别测得为3 MV/cm和12 MV/cm。当晶体结构从立方氮化硼(c-BN)的sp³变为h-BN的sp²时,h-BN的E⊥小于c-BN的E⊥,而h-BN的E∥急剧增加。因此,通过在高度各向异性的晶体结构中舍弃一个弱键合方向,h-BN可以仅在平行于c轴的方向上具有相对较高的E∥。这解释了为什么h-BN的E∥高于金刚石的E∥。此外,从高质量块状h-BN晶体获得的E值可被视为衡量通过化学气相沉积生长的h-BN层的结晶度的标准,以用于未来的电子应用。