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等离子体辅助分子束外延在抛光钴箔上大面积生长多层六方氮化硼。

Large-area growth of multi-layer hexagonal boron nitride on polished cobalt foils by plasma-assisted molecular beam epitaxy.

机构信息

Quantum Structures Laboratory, Department of Electrical and Computer Engineering, University of California, Riverside, California 92521, USA.

出版信息

Sci Rep. 2017 Feb 23;7:43100. doi: 10.1038/srep43100.

Abstract

Two-dimensional (2D) hexagonal boron nitride (h-BN), which has a similar honeycomb lattice structure to graphene, is promising as a dielectric material for a wide variety of potential applications based on 2D materials. Synthesis of high-quality, large-size and single-crystalline h-BN domains is of vital importance for fundamental research as well as practical applications. In this work, we report the growth of h-BN films on mechanically polished cobalt (Co) foils using plasma-assisted molecular beam epitaxy. Under appropriate growth conditions, the coverage of h-BN layers can be readily controlled by growth time. A large-area, multi-layer h-BN film with a thickness of 56 nm is confirmed by Raman spectroscopy, scanning electron microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy. In addition, the size of h-BN single domains is 20100 μm. Dielectric property of as-grown h-BN film is evaluated by characterization of Co(foil)/h-BN/Co(contact) capacitor devices. Breakdown electric field is in the range of 3.0~3.3 MV/cm, which indicates that the epitaxial h-BN film has good insulating characteristics. In addition, the effect of substrate morphology on h-BN growth is discussed regarding different domain density, lateral size, and thickness of the h-BN films grown on unpolished and polished Co foils.

摘要

二维(2D)六方氮化硼(h-BN)具有与石墨烯相似的蜂窝状晶格结构,有望成为基于 2D 材料的各种潜在应用的介电材料。合成高质量、大尺寸和单晶 h-BN 畴对于基础研究和实际应用都至关重要。在这项工作中,我们报告了使用等离子体辅助分子束外延在机械抛光的钴(Co)箔上生长 h-BN 薄膜。在适当的生长条件下,通过生长时间可以很容易地控制 h-BN 层的覆盖率。拉曼光谱、扫描电子显微镜、X 射线光电子能谱和透射电子显微镜证实了大面积、多层 h-BN 薄膜的厚度为 56nm。此外,h-BN 单畴的尺寸为 20100μm。通过 Co(箔)/h-BN/Co(接触)电容器器件的特性评估了生长的 h-BN 薄膜的介电性能。击穿电场在 3.0~3.3MV/cm 范围内,表明外延 h-BN 薄膜具有良好的绝缘特性。此外,还讨论了衬底形貌对在未抛光和抛光 Co 箔上生长的 h-BN 薄膜的畴密度、横向尺寸和厚度的影响。

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