Luo Jing-Ting, Quan Ao-Jie, Liang Guang-Xing, Zheng Zhuang-Hao, Ramadan Sami, Fu Chen, Li Hong-Lang, Fu Yong-Qing
College of Physics and Energy, Shenzhen Key Laboratory of Sensor Technology, Shenzhen University, 518060, China; Faculty of Engineering and Environment, Northumbria University, Newcastle upon Tyne NE1 8ST, UK.
College of Physics and Energy, Shenzhen Key Laboratory of Sensor Technology, Shenzhen University, 518060, China.
Ultrasonics. 2017 Mar;75:63-70. doi: 10.1016/j.ultras.2016.11.017. Epub 2016 Nov 25.
A multilayer structure of TeO/interdigital transducers (IDTs)/ZnO(112¯0)/Si(100) was proposed and investigated to achieve both high sensitivity and temperature-stability for bio-sensing applications. Dispersions of phase velocities, electromechanical coupling coefficients K, temperature coefficient of delay (TCD) and sensitivity in the multilayer structures were simulated as functions of normalized thicknesses of ZnO (h/λ) and TeO (h/λ) films. The fundamental mode of Love mode (LM) - surface acoustic wave (SAW) shows a larger value of K and higher sensitivity compared with those of the first mode. TeO film with a positive TCD not only compensates the temperature effect induced due to the negative TCD of ZnO(112¯0)/Si(100), but also enhances the sensitivity of the love mode device. The optimal normalized thickness ratios were identified to be h/λ=0.021 and h/λ=0.304, and the devices with such structures can which generate a normalized sensitivity of -1.04×10m/kg, a TCD of 0.009ppm/°C, and a K value of 2.76%.
为了实现生物传感应用中的高灵敏度和温度稳定性，提出并研究了一种TeO/叉指换能器（IDT）/ZnO(112¯0)/Si(100)的多层结构。模拟了多层结构中相速度、机电耦合系数K、延迟温度系数（TCD）和灵敏度随ZnO（h/λ）和TeO（h/λ）薄膜归一化厚度的变化。与第一模式相比，乐甫波（LM）-表面声波（SAW）的基模显示出更大的K值和更高的灵敏度。具有正TCD的TeO薄膜不仅补偿了由于ZnO(112¯0)/Si(100)的负TCD引起的温度效应，而且提高了乐甫波模式器件的灵敏度。确定最佳归一化厚度比为h/λ = 0.021和h/λ = 0.304，具有这种结构的器件可产生归一化灵敏度为-1.04×10m/kg、TCD为0.009ppm/°C和K值为2.76%。
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