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催化剂形状工程在各向异性截面纳米线生长中的应用。

Catalyst shape engineering for anisotropic cross-sectioned nanowire growth.

机构信息

Department of Electrical Engineering, Technion - Israel Institute of Technology, Haifa 32000, Israel.

出版信息

Sci Rep. 2017 Jan 20;7:40891. doi: 10.1038/srep40891.

Abstract

The ability to engineer material properties at the nanoscale is a crucial prerequisite for nanotechnology. Hereunder, we suggest and demonstrate a novel approach to realize non-hemispherically shaped nanowire catalysts, subsequently used to grow InP nanowires with a cross section anisotropy ratio of up to 1:1.8. Gold was deposited inside high aspect ratio nanotrenches in a 5 nm thick SiN selective area mask; inside the growth chamber, upon heating to 455 °C, the thin gold stripes agglomerated, resulting in an ellipsoidal dome (hemiellipsoid). The initial shape of the catalyst was preserved during growth to realize asymmetrically cross-sectioned nanowires. Moreover, the crystalline nature of the nanowire side facets was found to depend on the nano-trench orientation atop the substrate, resulting in hexagonal or octagonal cross-sections when the nano-trenches are aligned or misaligned with the [1̄10] orientation atop a [111]B substrate. These results establish the role of catalyst shape as a unique tool to engineer nanowire growth, potentially allowing further control over its physical properties.

摘要

在纳米尺度上设计材料性能的能力是纳米技术的关键前提。在此,我们提出并展示了一种新方法,实现了非半球形纳米线催化剂,随后用于生长纵横比高达 1:1.8 的 InP 纳米线。在 5nm 厚的 SiN 选择区域掩模中,将金沉积在高纵横比纳米沟槽内;在生长室内加热至 455°C 时,薄金条聚集在一起,形成一个椭圆形圆顶(半椭圆体)。在生长过程中,催化剂的初始形状得以保留,从而实现了非对称截面的纳米线。此外,纳米线侧面对称性的晶态性质取决于基底上纳米沟槽的取向,当纳米沟槽与[111]B 基底上的[1̄10]取向对齐或不对齐时,纳米线的横截面呈现出六边形或八边形。这些结果确立了催化剂形状作为工程纳米线生长的独特工具的作用,可能允许进一步控制其物理性质。

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