Institute of High Performance Computing, A*STAR, Singapore 138632, Singapore.
Institute of Materials and Research Engineering, A*STAR, Singapore 117602, Singapore.
Sci Rep. 2016 Sep 1;6:32398. doi: 10.1038/srep32398.
We perform systematic two-dimensional energetic analysis to study the stability of various nanostructures formed by dewetting solid films deposited on patterned substrates. Our analytical results show that by controlling system parameters such as the substrate surface pattern, film thickness and wetting angle, a variety of equilibrium nanostructures can be obtained. Phase diagrams are presented to show the complex relations between these system parameters and various nanostructure morphologies. We further carry out both phase field simulations and dewetting experiments to validate the analytically derived phase diagrams. Good agreements between the results from our energetic analyses and those from our phase field simulations and experiments verify our analysis. Hence, the phase diagrams presented here provide guidelines for using solid-state dewetting as a tool to achieve various nanostructures.
我们进行了系统的二维能量分析,以研究在图案化基底上沉积的固体薄膜去湿形成的各种纳米结构的稳定性。我们的分析结果表明,通过控制系统参数,如基底表面图案、薄膜厚度和润湿角,可以获得各种平衡纳米结构。相图显示了这些系统参数与各种纳米结构形态之间的复杂关系。我们进一步进行了相场模拟和去湿实验,以验证分析得出的相图。我们的能量分析结果与相场模拟和实验结果之间的良好一致性验证了我们的分析。因此,本文提出的相图为利用固态去湿作为实现各种纳米结构的工具提供了指导。