Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, USA.
J Chem Phys. 2017 Feb 7;146(5):052814. doi: 10.1063/1.4971287.
The surface reactivity of two copper-containing precursors, (Cu(hfac) and Cu(hfac)VTMS, where hfac is hexafluoroacetyloacetonate and VTMS is vinyltrimethylsilane), was investigated by dosing the precursors onto a surface of highly ordered pyrolytic graphite (HOPG) at room temperature. The behavior of these precursors on a pristine HOPG was compared to that on a surface activated by ion sputtering and subsequent oxidation to induce controlled surface defects. X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy were used to confirm copper deposition and its surface distribution, and to compare with the results of scanning electron microscopy and atomic force microscopy investigations. As expected, surface defects promote copper deposition; however, the specific structures deposited depend on the deposition precursor. Density functional theory was used to mimic the reactions of each precursor molecule on this surface and to determine the origins of this different reactivity.
研究了两种含铜前体(Cu(hfac)和 Cu(hfac)VTMS,其中 hfac 是六氟乙酰丙酮酸盐,VTMS 是乙烯基三甲基硅烷)的表面反应性,方法是将前体在室温下滴加到高度有序的热解石墨(HOPG)表面上。将这些前体在原始 HOPG 上的行为与通过离子溅射和随后的氧化来诱导受控表面缺陷的表面上的行为进行了比较。X 射线光电子能谱和能量色散 X 射线能谱用于确认铜的沉积及其表面分布,并与扫描电子显微镜和原子力显微镜研究的结果进行比较。正如预期的那样,表面缺陷促进了铜的沉积;然而,沉积的具体结构取决于沉积前体。密度泛函理论用于模拟每个前体分子在该表面上的反应,并确定这种不同反应性的起源。