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一种用于巨磁阻传感器的新型CMOS传感器。

A novel CMOS transducer for giant magnetoresistance sensors.

作者信息

Luong Van Su, Lu Chih-Cheng, Yang Jing-Wen, Jeng Jen-Tzong

机构信息

Graduate Institute of Mechatronic Engineering/Department of Mechanical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan.

Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 80778, Taiwan.

出版信息

Rev Sci Instrum. 2017 Feb;88(2):025004. doi: 10.1063/1.4976025.

Abstract

In this work, an ASIC (application specific integrated circuits) transducer circuit for field modulated giant magnetoresistance (GMR) sensors was designed and fabricated using a 0.18-μm CMOS process. The transducer circuits consist of a frequency divider, a digital phase shifter, an instrument amplifier, and an analog mixer. These comprise a mix of analog and digital circuit techniques. The compact chip size of 1.5 mm × 1.5 mm for both analog and digital parts was achieved using the TSMC18 1P6M (1-polysilicon 6-metal) process design kit, and the characteristics of the system were simulated using an HSpice simulator. The output of the transducer circuit is the result of the first harmonic detection, which resolves the modulated field using a phase sensitive detection (PSD) technique and is proportional to the measured magnetic field. When the dual-bridge GMR sensor is driven by the transducer circuit with a current of 10 mA at 10 kHz, the observed sensitivity of the field sensor is 10.2 mV/V/Oe and the nonlinearity error was 3% in the linear range of ±1 Oe. The performance of the system was also verified by rotating the sensor system horizontally in earth's magnetic field and recording the sinusoidal output with respect to the azimuth angle, which exhibits an error of less than ±0.04 Oe. These results prove that the ASIC transducer is suitable for driving the AC field modulated GMR sensors applied to geomagnetic measurement.

摘要

在这项工作中,采用0.18μm CMOS工艺设计并制作了一种用于场调制巨磁阻(GMR)传感器的专用集成电路(ASIC)换能器电路。该换能器电路由一个分频器、一个数字移相器、一个仪表放大器和一个模拟混频器组成。这些采用了模拟和数字电路技术的混合。使用台积电18 1P6M(1多晶硅6金属)工艺设计套件实现了模拟和数字部分均为1.5 mm×1.5 mm的紧凑芯片尺寸,并使用HSpice模拟器对系统特性进行了模拟。换能器电路的输出是一次谐波检测的结果,它使用相敏检测(PSD)技术解析调制场,并且与测量的磁场成正比。当双桥GMR传感器由换能器电路以10 kHz的10 mA电流驱动时,在场传感器的线性范围±1 Oe内,观察到的场灵敏度为10.2 mV/V/Oe,非线性误差为3%。通过在地球磁场中水平旋转传感器系统并记录相对于方位角的正弦输出,系统性能也得到了验证,该输出的误差小于±0.04 Oe。这些结果证明,ASIC换能器适用于驱动应用于地磁测量的交流场调制GMR传感器。

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