Institute of Physics, Technische Universität Chemnitz, Germany. Center for Microtechnologies, Technische Universität Chemnitz, Germany.
Nanotechnology. 2017 May 12;28(19):195303. doi: 10.1088/1361-6528/aa6713. Epub 2017 Mar 15.
Organic-inorganic hybrid electronic devices (HEDs) offer opportunities for functionalities that are not easily obtainable with either organic or inorganic materials individually. In the strive for down-scaling the channel length in planar geometry HEDs, the best results were achieved with electron beam lithography or nanoimprint lithography. Their application on the wafer level is, however, cost intensive and time consuming. Here, we propose trench isolated electrode (TIE) technology as a fast, cost effective, wafer-level approach for the fabrication of planar HEDs with electrode gaps in the range of 100 nm. We demonstrate that the formation of the organic channel can be realized by deposition from solution as well as by the thermal evaporation of organic molecules. To underline one key feature of planar HED-TIEs, namely full accessibility of the active area of the devices by external stimuli such as light, 6,13-bis (triisopropylsilylethynyl) (TIPS)-pentacene/Au HED-TIEs are successfully tested for possible application as hybrid photodetectors in the visible spectral range.
有机-无机杂化电子器件（HED）提供了一些功能，这些功能是单独使用有机或无机材料难以实现的。在努力缩小平面几何 HED 中沟道长度的过程中，电子束光刻或纳米压印光刻取得了最佳效果。然而，它们在晶圆级的应用成本高昂且耗时。在这里，我们提出了沟槽隔离电极（TIE）技术，作为一种快速、经济高效的晶圆级方法，用于制造电极间隙在 100nm 范围内的平面 HED。我们证明可以通过溶液沉积和有机分子的热蒸发来实现有机沟道的形成。为了强调平面 HED-TIE 的一个关键特征，即通过外部刺激（如光）完全访问器件的有源区，我们成功地测试了 6,13-双（三异丙基硅基乙炔基）（TIPS）-并五苯/Au HED-TIE，以作为在可见光谱范围内作为混合光电探测器的潜在应用。
