Note: A single specimen channel crack growth technique applied to brittle thin films on polymer substrates.

We introduce an external-load-assisted thin film channel crack growth technique to measure the subcritical crack growth properties of thin films (i.e., crack velocity, v, versus the strain energy release rate, G), and demonstrate it using 250-nm-thick SiN films on poly(ethylene terephthalate) substrates. The main particularity of this technique is that it requires a polymer substrate to allow loading to large strains (in order to induce channel cracking) without substrate fracture. Its main advantages are to provide a full v-G curve with a single specimen while relying on a simple specimen preparation and straightforward crack growth characterization. Importantly, the technique can be employed for a much larger range of thin films compared to the residual-stress-driven, thin film channel crack growth tests, including ultrathin films and thin film with residual compressive stresses. The restrictions to a proper use of this technique, related to the (visco)plastic deformation of the substrate, are discussed.