Influence of Polymer Substrate Damage on the Time Dependent Cracking of SiN Barrier Films.

This work is concerned with the long-term behavior of environmentally-assisted subcritical cracking of PECVD SiN barrier films on polyethylene terephthalate (PET) and polyimide (PI) substrates. While environmentally-assisted channel cracking in SiN has been previously demonstrated, with constant crack growth rates over short periods of time (<1 hour) during which no substrate damage was observed, the present experiments over longer periods reveal a regime where cracking also develops in the polymer substrate. This time-dependent local cracking of the polymer underneath the channel crack is expected based on creep rupture or static fatigue. Our combined in-situ microscopy and finite-element modeling results highlight the combined effects of neighboring cracks and substrate cracking on the crack growth rate evolution in the film. In most cases, the subcritical crack growth rates decrease over time by up to two orders of magnitude until steady-state rates are reached. For SiN on PI, crack growth rates were found to be more stable over time due to the lack of crack growth in the substrate as compared to SiN on PET. These results provide a guideline to effectively improving the long-term reliability of flexible barriers by a substrate possessing high strength which limits substrate damage.