Henning A J, Giusca C L
Appl Opt. 2017 Apr 1;56(10):2960-2967. doi: 10.1364/AO.56.002960.
It was suggested in [Appl. Opt.52, 3662 (2013)APOPAI0003-693510.1364/AO.52.003662] that the result of a measurement via coherence scanning interferometry could be viewed as the convolution of a point spread function of the instrument and an open surface in 3D space that lies at the air/material interface over a portion of the object's surface. Further, it was suggested that by measuring certain objects, such as ones that are very close to spherical, and whose surface is known to a sufficient level of accuracy, that a point spread function for the instrument could be determined from the measurement result. We conclude that the approximations used in this calculation do not give sufficient accuracy to allow this to be achieved, and that the truncation of the surface function from the closed surface surrounding the object is not defined sufficiently well in order to give a unique solution to the problem. The physical justification for the truncation of the surface in this manner is also questioned.
[《应用光学》52, 3662 (2013)，APOPAI0003 - 6935，10.1364/AO.52.003662]中指出，通过相干扫描干涉测量法得到的测量结果可视为仪器的点扩散函数与三维空间中位于物体表面一部分上的空气/材料界面处的开放表面的卷积。此外，有人提出，通过测量某些物体，例如非常接近球形且其表面精度已知足够高的物体，可以从测量结果中确定仪器的点扩散函数。我们得出结论，此计算中使用的近似方法无法提供足够的精度来实现这一点，并且从围绕物体的封闭表面截断表面函数的定义不够明确，无法为该问题提供唯一解。以这种方式截断表面的物理依据也受到质疑。
