Guo Yuqing, Xia Wei, Hu Zhangzhong, Wang Ming
Appl Opt. 2017 Mar 10;56(8):2068-2073. doi: 10.1364/AO.56.002068.
A novel sapphire fiber-optic high-temperature sensor has been designed and fabricated based on blackbody radiation theory. Metallic molybdenum has been used as the film material to develop the blackbody cavity, owing to its relatively high melting point compared to that of sapphire. More importantly, the fabrication process for the blackbody cavity is simple, efficient, and economical. Thermal radiation emitted from such a blackbody cavity is transmitted via optical fiber to a remote place for detection. The operating principle, the sensor structure, and the fabrication process are described here in detail. The developed high-temperature sensor was calibrated through a calibration blackbody furnace at temperatures from 900°C to 1200°C and tested by a sapphire crystal growth furnace up to 1880°C. The experimental results of our system agree well with those from a commercial Rayteck MR1SCCF infrared pyrometer, and the maximum residual is approximately 5°C, paving the way for high-accuracy temperature measurement especially for extremely harsh environments.
基于黑体辐射理论，设计并制造了一种新型蓝宝石光纤高温传感器。金属钼被用作薄膜材料来制作黑体腔，这是因为与蓝宝石相比，它具有相对较高的熔点。更重要的是，黑体腔的制造工艺简单、高效且经济。从这样一个黑体腔发出的热辐射通过光纤传输到远程位置进行检测。这里详细描述了其工作原理、传感器结构和制造工艺。所开发的高温传感器在900°C至1200°C的温度范围内通过校准黑体炉进行了校准，并在高达1880°C的蓝宝石晶体生长炉中进行了测试。我们系统的实验结果与商用Rayteck MR1SCCF红外高温计的结果吻合良好，最大残余误差约为5°C，为特别是在极端恶劣环境下的高精度温度测量铺平了道路。
