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晶粒尺寸对Pr掺杂二氧化铈薄膜中氧化还原诱导成分应力的作用

Role of grain size on redox induced compositional stresses in Pr doped ceria thin films.

作者信息

Sheth Jay, Chen Di, Tuller Harry L, Misture Scott T, Bishop Sean R, Sheldon Brian W

机构信息

School of Engineering, Brown University, Providence, RI, USA.

出版信息

Phys Chem Chem Phys. 2017 May 17;19(19):12206-12220. doi: 10.1039/c7cp00088j.

Abstract

In constrained geometries and in varying oxygen partial pressures and operating temperatures, exchange of oxygen ions between non-stoichiometric oxide thin films (for example, doped and undoped ceria systems) and the gas phase can lead to stresses. In this study, these compositional stresses were investigated in thin films of nanocrystalline 10% praseodymium doped ceria (PCO), as a function of average grain size. In situ wafer curvature measurements, along with High Temperature X-Ray Diffraction (HTXRD), were employed to measure stresses and strains, respectively on the PCO films during oxidation-reduction cycling, over the pO range of 10-10 atm at 750 °C. For relatively large grain sizes, the stress values agree well with the amount of expansion induced by oxygen non-stoichiometry (chemical expansion) predicted by a thin film defect equilibria model that was developed previously. The compositional stresses were found to increase with decreasing grain size. The origin of this effect, including the role of space charge effects near surfaces and interfaces are discussed in this paper. To our knowledge, this is the first time that such comparisons are reported by simultaneously employing high temperature in situ wafer curvature and HTXRD measurements on doped ceria systems.

摘要

在受限几何结构以及不同的氧分压和操作温度下,非化学计量比氧化物薄膜(例如,掺杂和未掺杂的二氧化铈体系)与气相之间的氧离子交换会导致应力产生。在本研究中,对纳米晶10%镨掺杂二氧化铈(PCO)薄膜中的这些成分应力进行了研究,该应力是平均晶粒尺寸的函数。采用原位晶圆曲率测量以及高温X射线衍射(HTXRD),分别在750℃下10-10大气压的pO范围内,对PCO薄膜在氧化还原循环过程中的应力和应变进行测量。对于相对较大的晶粒尺寸,应力值与先前开发的薄膜缺陷平衡模型预测的由氧非化学计量比引起的膨胀量(化学膨胀)非常吻合。发现成分应力随晶粒尺寸减小而增加。本文讨论了这种效应的起源,包括表面和界面附近空间电荷效应的作用。据我们所知,这是首次通过同时对掺杂二氧化铈体系进行高温原位晶圆曲率和HTXRD测量来报告此类比较。

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