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基于针尖-样品电容的扫描探针显微镜快速可靠的预接近方法。

Fast and reliable pre-approach for scanning probe microscopes based on tip-sample capacitance.

作者信息

de Voogd J M, van Spronsen M A, Kalff F E, Bryant B, Ostojić O, den Haan A M J, Groot I M N, Oosterkamp T H, Otte A F, Rost M J

机构信息

Leiden Institute of Physics, Leiden University, P.O. Box 9504, 2300 RA Leiden, The Netherlands.

Leiden Institute of Physics, Leiden University, P.O. Box 9504, 2300 RA Leiden, The Netherlands.

出版信息

Ultramicroscopy. 2017 Oct;181:61-69. doi: 10.1016/j.ultramic.2017.05.009. Epub 2017 May 10.

Abstract

Within the last three decades Scanning Probe Microscopy has been developed to a powerful tool for measuring surfaces and their properties on an atomic scale such that users can be found nowadays not only in academia but also in industry. This development is still pushed further by researchers, who continuously exploit new possibilities of this technique, as well as companies that focus mainly on the usability. However, although imaging has become significantly easier, the time required for a safe approach (without unwanted tip-sample contact) can be very time consuming, especially if the microscope is not equipped or suited for the observation of the tip-sample distance with an additional optical microscope. Here we show that the measurement of the absolute tip-sample capacitance provides an ideal solution for a fast and reliable pre-approach. The absolute tip-sample capacitance shows a generic behavior as a function of the distance, even though we measured it on several completely different setups. Insight into this behavior is gained via an analytical and computational analysis, from which two additional advantages arise: the capacitance measurement can be applied for observing, analyzing, and fine-tuning of the approach motor, as well as for the determination of the (effective) tip radius. The latter provides important information about the sharpness of the measured tip and can be used not only to characterize new (freshly etched) tips but also for the determination of the degradation after a tip-sample contact/crash.

摘要

在过去三十年中,扫描探针显微镜已发展成为一种强大的工具,可在原子尺度上测量表面及其特性,如今不仅在学术界,而且在工业界都能找到其用户。研究人员不断挖掘这项技术的新可能性,以及主要专注于实用性的公司,仍在进一步推动这一发展。然而,尽管成像变得明显更容易,但安全进针(避免不必要的针尖-样品接触)所需的时间可能非常耗时,特别是如果显微镜没有配备或不适合用额外的光学显微镜观察针尖-样品距离。在此我们表明,绝对针尖-样品电容的测量为快速可靠的预进针提供了理想的解决方案。绝对针尖-样品电容作为距离的函数呈现出一般性行为,尽管我们在几种完全不同的设置上进行了测量。通过分析和计算分析深入了解这种行为,由此产生了另外两个优点:电容测量可用于观察、分析和微调进针电机,以及确定(有效)针尖半径。后者提供了有关被测针尖尖锐度的重要信息,不仅可用于表征新的(新蚀刻的)针尖,还可用于确定针尖-样品接触/碰撞后的降解情况。

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