Brodu E, Bouzy E, Fundenberger J-J
Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux (LEM3), UMR CNRS 7239, Université de Lorraine, 57045 Metz, France; Laboratory of Excellence on Design of Alloy Metals for low-MAss Structures (DAMAS), University of Lorraine, 57045 Metz, France.
Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux (LEM3), UMR CNRS 7239, Université de Lorraine, 57045 Metz, France; Laboratory of Excellence on Design of Alloy Metals for low-MAss Structures (DAMAS), University of Lorraine, 57045 Metz, France.
Ultramicroscopy. 2017 Oct;181:123-133. doi: 10.1016/j.ultramic.2017.04.017. Epub 2017 Apr 29.
Automated orientation mapping in SEM, until now relying on EBSD solely, is currently being improved with the development of the TKD technique. As part of the development of TKD, we introduce a new, TEM-like geometric configuration, with a detector "on-axis" relative to the electron beam, while the detector was "off-axis" in its first form. This new technique produces a wide range of diffraction contrast (spots, lines, bands), varying with sample thickness, incident energy, atomic number and scattering angle. Some of the main trends are identified and discussed. In particular, a model based on the plasmon and phonon scattering is proposed to account for the disappearing of diffraction spots with thickness and incident energy. This work should help experimentalists determine which microscope and sample parameters to use in order to obtain a specific contrast. Finally, the strength and weakness of each diffraction feature for orientation mapping are also reviewed.
扫描电子显微镜中的自动取向映射，到目前为止仅依赖于电子背散射衍射（EBSD），随着扫描透射电子显微镜（TKD）技术的发展，目前正在得到改进。作为TKD技术发展的一部分，我们引入了一种类似透射电子显微镜（TEM）的新几何配置，其中探测器相对于电子束“同轴”，而其最初形式的探测器是“离轴”的。这项新技术产生了广泛的衍射衬度（斑点、线条、带状），其随样品厚度、入射能量、原子序数和散射角而变化。确定并讨论了一些主要趋势。特别是，提出了一种基于等离子体激元和声子散射的模型，以解释衍射斑点随厚度和入射能量的消失。这项工作应有助于实验人员确定为获得特定衬度应使用哪些显微镜和样品参数。最后，还对用于取向映射的每个衍射特征的优缺点进行了综述。
