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利用扫描电子显微镜中的透射菊池衍射对纳米结构材料进行取向映射。

Orientation mapping of nanostructured materials using transmission Kikuchi diffraction in the scanning electron microscope.

机构信息

Australian Centre for Microscopy & Microanalysis, The University of Sydney, Madsen Building F09 Sydney, NSW 2006, Australia.

出版信息

Ultramicroscopy. 2012 Sep;120:16-24. doi: 10.1016/j.ultramic.2012.06.004. Epub 2012 Jun 15.

DOI:10.1016/j.ultramic.2012.06.004
PMID:22796555
Abstract

In this study, the new technique of transmission Kikuchi diffraction (TKD) in the scanning electron microscope (SEM) has been applied for the first time to enable orientation mapping of bulk, nanostructured metals. The results show how the improved spatial resolution of SEM-TKD, compared to conventional EBSD, enables reliable mapping of truly nanostructured metals and alloys, with mean grain sizes in the 40-200 nm range. The spatial resolution of the technique is significantly below 10nm, and contrasting examples are shown from both dense (Ni) and lighter (Al-alloy) materials. Despite the burden of preparing thin, electron-transparent samples, orientation mapping using SEM-TKD is likely to become invaluable for routine characterisation of nanocrystalline and, potentially, highly deformed microstructures.

摘要

在这项研究中,首次将扫描电子显微镜(SEM)中的新型透射菊池衍射(TKD)技术应用于体纳米结构金属的取向映射。结果表明,与传统 EBSD 相比,SEM-TKD 的改进空间分辨率如何能够可靠地映射真正的纳米结构金属和合金,其平均晶粒尺寸在 40-200nm 范围内。该技术的空间分辨率显著低于 10nm,并展示了来自致密(Ni)和更轻(Al 合金)材料的对比示例。尽管制备薄的、电子透明的样品具有挑战性,但使用 SEM-TKD 进行取向映射对于纳米晶和潜在的高变形微结构的常规特征化可能变得非常有价值。

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