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结合在射频和光频范围内测量的相位图像。

Combining phase images measured in the radio frequency and the optical frequency ranges.

作者信息

Pham Quang Duc, Hayasaki Yoshio

出版信息

Opt Lett. 2017 Jun 1;42(11):2062-2065. doi: 10.1364/OL.42.002062.

DOI:10.1364/OL.42.002062
PMID:28569845
Abstract

Phase images measured in the radio frequency (RF) and optical frequency (OF) ranges, whose difference was about 4×10, were combined on the basis of a pattern matching method. RF phase imaging was implemented with an optical frequency-comb femtosecond laser and a single-pixel camera to measure a meter-order depth object with micrometer-order accuracy. OF phase imaging was implemented with an optical interferometer using a low-coherence femtosecond laser pulse to measure the profile with nanometer-order accuracy and high spatial resolution. Combining the images obtained from both phase measurement systems enabled profilometry of a large depth object with high lateral and axial resolutions.

摘要

在射频(RF)和光频(OF)范围内测量的相位图像,其差值约为4×10,基于模式匹配方法进行了组合。射频相位成像通过光频梳飞秒激光和单像素相机实现,以微米级精度测量米级深度的物体。光频相位成像通过使用低相干飞秒激光脉冲的光学干涉仪实现,以纳米级精度和高空间分辨率测量轮廓。将从两个相位测量系统获得的图像相结合,能够对大深度物体进行具有高横向和轴向分辨率的轮廓测量。

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