Araki Shinji, Ishikawa Yasuaki, Wang Xudongfang, Uenuma Mutsunori, Cho Donghwi, Jeon Seokwoo, Uraoka Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara, 630-0192, Japan.
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, 305-701, Republic of Korea.
Nanoscale Res Lett. 2017 Dec;12(1):419. doi: 10.1186/s11671-017-2186-6. Epub 2017 Jun 17.
Fabrication methods for a 3D periodic nanostructure with excellent and unique properties for various applications, such as photonic and phononic crystals, have attracted considerable interest. Templating processes using colloidal crystals have been proposed to create nanoshell-based 3D structures over a large area with ease. However, there are technical limitations in structural design, resulting in difficulties for structural flexibility. Here, we demonstrate a combination of proximity field nanopatterning and infiltration processes using solution-derived ZnO for a nanoshell-based 3D periodic structure with high structural flexibility and controllability. A unique process of infiltration of a solution-derived material into a polymeric template prepared by a proximity field nanopatterning process achieves the fabrication of a pre-formed layer that works as a protective layer for the template and framework for the inverse structure. Subsequently, this process shows the controllability of nanoshell thickness and significant improvement in the structure height shrinkage factor (16%) compared to those of a previous non-vacuum infiltration method (34%). The proposed method offers high controllability and flexibility in the design of structural sizes, leading to further development toward nanoshell-based 3D structures for various applications including energy devices and sensors.
用于制造具有优异独特性能的三维周期性纳米结构的方法，可用于光子晶体和声子晶体等各种应用，已引起了广泛关注。有人提出使用胶体晶体的模板工艺来轻松地在大面积上创建基于纳米壳的三维结构。然而，在结构设计方面存在技术限制，导致结构灵活性存在困难。在此，我们展示了一种将近场纳米图案化与使用溶液衍生的氧化锌的渗透工艺相结合的方法，用于制造具有高结构灵活性和可控性的基于纳米壳的三维周期性结构。通过将溶液衍生材料渗透到由近场纳米图案化工艺制备的聚合物模板中这一独特过程，实现了预制层的制造，该预制层可作为模板的保护层和反结构的框架。随后，与之前的非真空渗透方法（34%）相比，该工艺显示出纳米壳厚度的可控性以及结构高度收缩因子的显著改善（16%）。所提出的方法在结构尺寸设计方面具有高度的可控性和灵活性，从而推动了基于纳米壳的三维结构在包括能量装置和传感器在内的各种应用中的进一步发展。
