Structure diagnostics of heterostructures and multi-layered systems by X-ray multiple diffraction.

This article presents the results of research on multi-layered heterostructures by a modified calculation technique of multiple X-ray diffraction. The Al In Sb heterostructure and a Zn(Mn)Se/GaAs(001) multi-layered system were used as models to specify conditions for cases of coincidental coplanar three-beam or coincidental noncoplanar four-beam X-ray diffraction. These conditions provide the means for a high-precision determination of lattice parameters and strain anisotropy in layers.