Valery A, Rauch E F, Clément L, Lorut F
Physical Characterization group, STMicroelectronics, Crolles, France.
SIMaP Laboratory, CNRS, Université Grenoble Alpes, Grenoble, France.
J Microsc. 2017 Nov;268(2):208-218. doi: 10.1111/jmi.12599. Epub 2017 Jul 4.
The diffraction patterns acquired with a transmission electron microscope (TEM) contain Bragg reflections related to all the crystals superimposed in the thin foil and crossed by the electron beam. Regarding TEM-based orientation and phase characterisation techniques, the nondissociation of these signals is usually considered as the main limitation for the indexation of diffraction patterns. A new method to identify the information related to the distinct but overlapped grains is presented. It consists in subtracting the signature of the dominant crystal before reindexing the diffraction pattern. The method is coupled to the template matching algorithm used in a standard automated crystal orientation mapping tool (ACOM-TEM). The capabilities of the approach are illustrated with the characterisation of a NiSi thin film stacked on a monocrystalline Si layer. Then, a subtracting-indexing cycle applied to a 70 nm thick thin foil containing polycrystalline tungsten electrical contacts shows the capability of the technique to recognise small nondominant grains.
用透射电子显微镜（TEM）获得的衍射图案包含与所有叠加在薄箔中并被电子束穿过的晶体相关的布拉格反射。对于基于TEM的取向和相表征技术，这些信号的不分离通常被认为是衍射图案指数化的主要限制。本文提出了一种识别与不同但重叠晶粒相关信息的新方法。该方法包括在对衍射图案重新指数化之前减去主导晶体的特征。该方法与标准自动晶体取向映射工具（ACOM-TEM）中使用的模板匹配算法相结合。通过对堆叠在单晶硅层上的NiSi薄膜的表征来说明该方法的能力。然后，对包含多晶钨电触点的70nm厚薄箔应用减法-指数化循环，展示了该技术识别小的非主导晶粒的能力。
