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双模操作,基于纳米孔阵列的高选择性等离子体颜色滤波器。

Dual mode operation, highly selective nanohole array-based plasmonic colour filters.

机构信息

Department of Electrical Engineering, Shahid Bahonar University, Kerman, 7616914111, Iran.

出版信息

Nanotechnology. 2017 Sep 20;28(38):385203. doi: 10.1088/1361-6528/aa80f4. Epub 2017 Jul 20.

DOI:10.1088/1361-6528/aa80f4
PMID:28726686
Abstract

Taking advantage of nanostructured metal films as plasmonic colour filters (PCFs) has been evolved remarkably as an alternative to the conventional technologies of chemical colour filtering. However, most of the proposed PCFs depict a poor colour purity focusing on generating either the additive or subtractive colours. In this paper, we present dual mode operation PCFs employing an opaque aluminium film patterned with sub-wavelength holes. Subtractive colours like cyan, magenta, and yellow are the results of reflection mode of these filters yielding optical efficiencies as high as 70%-80% and full width at half maximum of the stop-bands up to 40-50 nm. The colour selectivity of the transmission mode for the additive colours is also significant due to their enhanced performance through the utilization of a relatively thick aluminium film in contact with a modified dielectric environment. These filters provide a simple design with one-step lithography in addition to compatibility with the conventional CMOS processes. Moreover, they are polarization insensitive due to their symmetric geometry. A complete palette of pure subtractive and additive colours has been realized with potential applications, such as multispectral imaging, CMOS image sensors, displays, and colour printing.

摘要

利用纳米结构金属薄膜作为等离子体颜色滤波器(PCF)已经成为一种替代传统化学颜色过滤技术的显著方法。然而,大多数提出的 PCF 显示出较差的颜色纯度,主要集中在产生加色或减色。在本文中,我们提出了双模式操作的 PCF,使用带有亚波长孔的不透明铝膜进行图案化。这些滤波器的反射模式产生了青色、品红色和黄色等减色,其光学效率高达 70%-80%,截止带的半最大值全宽可达 40-50nm。由于通过利用与改进的介电环境接触的相对较厚的铝膜来增强性能,传输模式的加色的颜色选择性也很显著。这些滤波器提供了一种简单的设计,具有一步光刻,并且与传统的 CMOS 工艺兼容。此外,由于其对称的几何形状,它们对偏振不敏感。已经实现了完整的纯减色和加色调色板,并具有多光谱成像、CMOS 图像传感器、显示器和彩色打印等潜在应用。

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