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溅射参数及铜掺杂对聚合物基底上铁和氮化铁纳米薄膜表面自由能及磁性能的影响

The Effect of Sputtering Parameters and Doping of Copper on Surface Free Energy and Magnetic Properties of Iron and Iron Nitride Nano Thin Films on Polymer Substrate.

作者信息

Khan Waheed, Wang Qun, Jin Xin, Feng Tangfeng

机构信息

College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China.

出版信息

Materials (Basel). 2017 Feb 22;10(2):217. doi: 10.3390/ma10020217.

Abstract

The objective of this study was to deposit thin films on PET polymer substrate and examine the functional properties systematically. Their properties have been studied as a function of the N₂-Ar flow rates, deposition time span and Cu doping. Iron nitride film deposited on both sides exhibits ferromagnetic phases, γ'-Fe₄N and ε-Fe₃N co-existed, shows negligible magnetic anisotropy. Other samples show the evolution of N-rich (FeN, Fe₂N) and N-poor (FeN₂, Fe₃N, Fe₄N) phases under different deposition time conditions. XPS analysis and free energy calculations confirmed that co-sputtered Fe-Cu thin films are more stable than layer deposited counterparts. From VSM results it is evident that the dominant phase, changes steadily from the ferromagnetic α-Fe (N) to the paramagnetic ξ-Fe₂N with the increase of nitrogen flow rates and the ordering of the nitrogen atoms. Binding energy increases steadily from 733 eV to 740 eV with the increasing thickness of thin films from 74 nm to 94 nm. It was observed that surface energy decreases as the contact angle of glycol increases and changes the thin film surface from polar to nonpolar. TEM images indicate that cubic γ'-Fe₄N and ε-Fe₃N nano particles oriented in preferred directions dispersed uniformly in the amorphous iron nitride matrix.

摘要

本研究的目的是在聚对苯二甲酸乙二酯(PET)聚合物基底上沉积薄膜,并系统地研究其功能特性。已将它们的特性作为氮气-氩气流量、沉积时间跨度和铜掺杂的函数进行了研究。双面沉积的氮化铁薄膜呈现出铁磁相,γ'-Fe₄N和ε-Fe₃N共存,磁各向异性可忽略不计。其他样品在不同沉积时间条件下呈现出富氮相(FeN、Fe₂N)和贫氮相(FeN₂、Fe₃N、Fe₄N)的演变。X射线光电子能谱(XPS)分析和自由能计算证实,共溅射的铁-铜薄膜比层沉积的对应薄膜更稳定。从振动样品磁强计(VSM)结果可以明显看出,随着氮气流量的增加和氮原子的有序排列,主导相从铁磁α-Fe(N)稳步变为顺磁ξ-Fe₂N。随着薄膜厚度从74纳米增加到94纳米,结合能从733电子伏特稳步增加到740电子伏特。观察到随着乙二醇接触角的增加表面能降低,并且薄膜表面从极性变为非极性。透射电子显微镜(TEM)图像表明,立方γ'-Fe₄N和ε-Fe₃N纳米颗粒沿择优方向取向,均匀分散在非晶态氮化铁基体中。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1808/5459117/7a88c3e5bd5d/materials-10-00217-g001.jpg

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