微悬臂梁双金属效应引起的弯曲起源研究。

Study of the origin of bending induced by bimetallic effect on microcantilever.

作者信息

Ramos Daniel, Mertens Johann, Calleja Montserrat, Tamayo Javier

机构信息

BioNanoMechanics Lab, National Centre for Microelectronics, IMM-CNM, CSIC Isaac Newton 8 (PTM), Tres Cantos 28760, Madrid, Spain.

出版信息

Sensors (Basel). 2007 Sep 5;7(9):1757-1765. doi: 10.3390/s7091757.

DOI:10.3390/s7091757

PMID:28903196

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3841845/

Abstract

An analytical model for predicting the deflection and force of a bimaterialcantilever is presented. We introduce the clamping effect characterised by an axial loadupon temperature changes. This new approach predicts a non linear thermal dependence ofcantilever strain. A profilometry technique was used to measure the thermal strain.Comparison with experimental results is used to verify the model. The concordance of theanalytical model presented with experimental measurements is better than 10.

摘要

提出了一种用于预测双材料悬臂梁挠度和力的分析模型。我们引入了由温度变化时的轴向载荷表征的夹紧效应。这种新方法预测了悬臂梁应变的非线性热依赖性。使用轮廓测量技术来测量热应变。通过与实验结果进行比较来验证该模型。所提出的分析模型与实验测量结果的一致性优于10。