Lin Wen-Hui, Zhao Ya-Pu
College of Science, China Agricultural University, Beijing 100083, China.
State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China.
Sensors (Basel). 2007 Nov 29;7(12):3012-3026. doi: 10.3390/s7123012.
The influence of damping on the dynamical behavior of the electrostaticparallel-plate and torsional actuators with the van der Waals (vdW) or Casimir force(torque) is presented. The values of the pull-in parameters and the number of theequilibrium points do not change whether there is damping or not. The ability ofequilibrium points is varied with the appearance of damping. One equilibrium point is anunstable saddle with a different damping coefficient, the other equilibrium point is astable node when the damping coefficient is greater than some critical value, andotherwise it is a stable focus. Then there are two heteroclinic orbits passing from theunstable saddle point to the stable node or focus.
本文研究了阻尼对具有范德华力(vdW)或卡西米尔力(扭矩)的静电平行板和扭转微机电系统(MEMS)驱动器动力学行为的影响。无论有无阻尼,拉入参数值和平衡点数量均不变。平衡点的性质随阻尼的出现而变化。一个平衡点是具有不同阻尼系数的不稳定鞍点,另一个平衡点在阻尼系数大于某个临界值时是稳定节点,否则是稳定焦点。然后存在两条从不稳定鞍点到稳定节点或焦点的异宿轨道。