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表面粗糙度、化学成分和本征氧化层结晶度对 Ti 箔上自组装 GaN 纳米线取向的影响。

Effect of surface roughness, chemical composition, and native oxide crystallinity on the orientation of self-assembled GaN nanowires on Ti foils.

机构信息

Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin e.V., Hausvogteiplatz 5-7, 10117 Berlin, Germany.

出版信息

Nanotechnology. 2017 Oct 20;28(42):425602. doi: 10.1088/1361-6528/aa84a1. Epub 2017 Sep 20.

Abstract

We report on plasma-assisted molecular beam epitaxial growth of almost randomly oriented, uniformly tilted, and vertically aligned self-assembled GaN nanowires (NWs), respectively, on different types of polycrystalline Ti foils. The NW orientation with respect to the substrate normal, which is affected by an in situ treatment of the foil surface before NW growth, depends on the crystallinity of the native oxide. Direct growth on the as-received foils results in the formation of ensembles of nearly randomly oriented NWs due to the strong roughening of the surface induced by chemical reactions between the impinging elements and Ti. Surface nitridation preceding the NW growth is found to reduce this roughening by transformation of the uppermost layers into TiN and TiO N species. These compounds are more stable against chemical reactions and facilitate the growth of uniformly oriented GaN NW ensembles on the surface of the individual grains of the polycrystalline Ti foils. If an amorphous oxide layer is present at the foil surface, vertically oriented NWs are obtained all across the substrate because this layer blocks the transfering of the epitaxial information from the underlying grains. The control of NW orientation and the understanding behind the achievement of vertically oriented NWs obtained in this study represent an important step towards the realization of GaN NW-based bendable devices on polycrystalline metal foils.

摘要

我们报告了在不同类型的多晶 Ti 箔上,通过等离子体辅助分子束外延生长,分别得到了近乎随机取向、均匀倾斜和垂直排列的自组装 GaN 纳米线(NWs)。NW 相对于基底法线的取向受到 NW 生长前箔表面的原位处理的影响,这取决于本征氧化物的结晶度。由于撞击元素与 Ti 之间的化学反应导致表面强烈粗化,直接在接收的箔上生长会导致几乎随机取向的 NW 集合的形成。在 NW 生长之前进行表面氮化被发现可以通过将最上层转化为 TiN 和 TiO x N y 物种来减少这种粗化。这些化合物更稳定,不易发生化学反应,并有助于在多晶 Ti 箔的单个晶粒表面上生长出取向均匀的 GaN NW 集合。如果箔表面存在非晶态氧化物层,则由于该层阻止了外延信息从下伏晶粒的传递,整个基底上都会得到垂直取向的 NW。本研究中实现垂直取向 NW 的控制和理解是朝着在多晶金属箔上实现基于 GaN NW 的可弯曲器件的重要一步。

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