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嵌入超材料抗反射涂层硅中的复合反射/吸收红外阻挡滤光片。

Composite reflective/absorptive IR-blocking filters embedded in metamaterial antireflection-coated silicon.

作者信息

Munson C D, Choi S K, Coughlin K P, McMahon J J, Miller K H, Page L A, Wollack E J

出版信息

Appl Opt. 2017 Jul 1;56(19):5349-5354. doi: 10.1364/AO.56.005349.

DOI:10.1364/AO.56.005349
PMID:29047488
Abstract

Infrared (IR)-blocking filters are crucial for controlling the radiative loading on cryogenic systems and for optimizing the sensitivity of bolometric detectors in the far-IR. We present a new IR filter approach based on a combination of patterned frequency-selective structures on silicon and a thin (25-75 μm thick) absorptive composite based on powdered reststrahlen absorbing materials. For a 300 K blackbody, this combination reflects ∼50% of the incoming light and blocks >99.8% of the total power with negligible thermal gradients and excellent low-frequency transmission. This allows a reduction in the IR thermal loading to negligible levels in a single cold filter. These composite filters are fabricated on silicon substrates, which provide excellent thermal transport laterally through the filter and ensure that the entire area of the absorptive filter stays near the bath temperature. A metamaterial antireflection coating cut into these substrates reduces in-band reflections to below 1%, and the in-band absorption of the powder mix is below 1% for signal bands below 750 GHz. This type of filter can be directly incorporated into silicon refractive optical elements.

摘要

红外(IR)阻挡滤光片对于控制低温系统上的辐射负载以及优化远红外测辐射热探测器的灵敏度至关重要。我们提出了一种新的红外滤光片方法,该方法基于硅上的图案化频率选择结构与基于粉末状剩余射线吸收材料的薄(25 - 75微米厚)吸收性复合材料的组合。对于300K的黑体,这种组合反射约50%的入射光,并阻挡>99.8%的总功率,热梯度可忽略不计且低频传输极佳。这使得在单个冷滤光片中红外热负载降低到可忽略的水平。这些复合滤光片是在硅衬底上制造的,硅衬底可通过滤光片横向提供出色的热传输,并确保吸收性滤光片的整个区域保持接近浴温。切割到这些衬底中的超材料抗反射涂层可将带内反射降低到1%以下,对于低于750GHz的信号带,粉末混合物的带内吸收低于1%。这种类型的滤光片可直接集成到硅折射光学元件中。

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