Kim Deokman, Hong Seongkyeol, Jang Jaesung, Park Junhong
Department of Mechanical Engineering, Hanyang University, Seoul 04763, Korea.
Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Korea.
Sensors (Basel). 2017 Oct 27;17(11):2466. doi: 10.3390/s17112466.
The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone), and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen) were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases.
大多数基于悬臂梁的传感器通过共振频率和峰值宽度的变化来测定流体密度和粘度。在此，我们展示了一种在分布式流体负载下使用压电激发微悬臂梁的波传播分析方法。研究了部分浸入液体（水、25%甘油和丙酮）中的微尺度厚度悬臂梁以及完全浸入气体（三种不同压力的空气、二氧化碳和氮气）中的纳米尺度厚度微加工悬臂梁的驻波形状，以确定流体 - 结构相互作用的影响，从而测定流体性质。通过与已知流体性质进行比较验证了该测量方法，二者结果吻合良好。液体密度的相对差异小于4.8%，粘度的相对差异小于3.1%；气体密度的相对差异小于6.7%，粘度的相对差异小于7.3%，表明在液体中的吻合度优于气体。
