Zhang Huzhong, Cheng Yongjun, Sun Jian, Wang Yongjun, Xi Zhenhua, Dong Meng, Li Detian
Science and Technology on Vacuum Technology and Physics Laboratory, Institute of Physics, Lanzhou 730000, China.
Rev Sci Instrum. 2017 Oct;88(10):105107. doi: 10.1063/1.5006526.
This work reports on the complete design and the properties of an ionization gauge based on a carbon nanotube cathode, which can measure ultrahigh vacuum without thermal effects. The gauge is composed of a pressure sensor and an electronic controller. This pressure sensor is constructed based on a hot-cathode ionization gauge, where the traditional hot filament is replaced by an electron source prepared with multi-wall nanotubes. Besides, an electronic controller was developed for bias voltage supply, low current detection, and pressure indication. The gauge was calibrated in the pressure range of 10 to 10 Pa in a XHV/UHV calibration apparatus. The gauge shows good linear characteristics in different gases. The calibrated sensitivity is 0.035 Pa in N, and the standard deviation of the sensitivity is about 1.1%. In addition, the stability of the sensitivity was learned in a long period. The standard deviation of the sensitivity factor "S" during one year is 2.0% for Ar and 1.6% for N.
这项工作报道了一种基于碳纳米管阴极的电离规的完整设计及其特性，该电离规可在无热效应的情况下测量超高真空。该规由压力传感器和电子控制器组成。此压力传感器基于热阴极电离规构建，其中传统的热灯丝被用多壁纳米管制备的电子源所取代。此外，还开发了一种电子控制器用于偏置电压供应、低电流检测和压力指示。该规在超高真空/特高真空校准装置中于10至10 Pa的压力范围内进行了校准。该规在不同气体中显示出良好的线性特性。在氮气中校准后的灵敏度为0.035 Pa，灵敏度的标准偏差约为1.1%。此外，还研究了灵敏度在长时间内的稳定性。对于氩气，灵敏度因子“S”在一年中的标准偏差为2.0%，对于氮气为1.6%。
