Zaitsev B D, Teplykh A A, Shikhabudinov A M, Borodina I A, Kisin V V, Sinev I V
Kotel'nikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia.
Kotel'nikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia.
Ultrasonics. 2018 Mar;84:96-100. doi: 10.1016/j.ultras.2017.10.016. Epub 2017 Oct 26.
The effect of a thin layer with the finite surface conductivity located near the lateral electric field excited resonator on its characteristics is studied theoretically and experimentally. It has been shown that for the fixed distance between the free side of the resonator and conducting layer with increasing the surface conductivity of the layer the resonant frequency of the parallel resonance remains initially practically constant, then sharply decreases in a certain range and then insignificantly changes. For the fixed value of the layer conductivity the parallel resonant frequency increases at the increase in the gap between the resonator and layer and then achieves the saturation. The maximum change in the frequency of the parallel resonance corresponds to a zero gap when the layer conductivity varies over the wide range is equal to ∼1%. The frequency of the series resonance decreases only by ∼0.08% due to the change in the layer conductivity. The obtained results may be useful for the development of the gas sensors based on the lateral electric field excited piezoelectric resonator conjugated to the gas sensitive film, the conductivity of which changes in the presence of the given gas.
从理论和实验两方面研究了位于横向电场激励谐振器附近具有有限表面电导率的薄层对其特性的影响。结果表明，对于谐振器自由侧与导电层之间的固定距离，随着层表面电导率的增加，并联谐振的谐振频率最初实际上保持恒定，然后在一定范围内急剧下降，之后变化不明显。对于层电导率的固定值，并联谐振频率随着谐振器与层之间间隙的增加而增加，然后达到饱和。当层电导率在很宽的范围内变化时，并联谐振频率的最大变化对应于零间隙，等于~1%。串联谐振频率仅因层电导率的变化而降低约0.08%。所得结果可能有助于基于与气敏膜共轭的横向电场激励压电谐振器开发气体传感器，该气敏膜在给定气体存在时电导率会发生变化。
