Zhou Chao, Deng Lu, Cheng Long, Cao Zhiqiang, Wang Shuo, Tan Min
State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China.
School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China.
Scanning. 2017 Jun 19;2017:3982503. doi: 10.1155/2017/3982503. eCollection 2017.
In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
在探测纳米结构的运动中，重复定位和移动频繁发生，并且对位置误差的容忍度要求严格。由于视觉伺服是自动操作中最重要的工具，因此操纵器轴与图像之间的一致性非常重要。本文提出了一种通过识别闭环控制末端执行器的位置来实现扫描电子显微镜（SEM）内纳米操纵器自动轴对准的方法，该方法可以表征这两个轴之间的关系，然后据此计算旋转矩阵。还计算了该方法的误差及其传递函数，以比较迭代法和平均法。本文提出的方法可以加快轴对准的过程，避免电子束诱导沉积对末端的影响。实验证明，该方法在90秒内可实现0.1度的精度。
