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化学设计的具有银纳米晶体的金属/绝缘混合纳米结构,用于高灵敏度可穿戴压力传感器。

Chemically Designed Metallic/Insulating Hybrid Nanostructures with Silver Nanocrystals for Highly Sensitive Wearable Pressure Sensors.

机构信息

Photo-Electronic Hybrids Research Center, Korea Institute of Science and Technology , Seoul 136-791, Republic of Korea.

出版信息

ACS Appl Mater Interfaces. 2018 Jan 10;10(1):1389-1398. doi: 10.1021/acsami.7b15566. Epub 2017 Dec 28.

Abstract

With the increase in interest in wearable tactile pressure sensors for e-skin, researches to make nanostructures to achieve high sensitivity have been actively conducted. However, limitations such as complex fabrication processes using expensive equipment still exist. Herein, simple lithography-free techniques to develop pyramid-like metal/insulator hybrid nanostructures utilizing nanocrystals (NCs) are demonstrated. Ligand-exchanged and unexchanged silver NC thin films are used as metallic and insulating components, respectively. The interfaces of each NC layer are chemically engineered to create discontinuous insulating layers, i.e., spacers for improved sensitivity, and eventually to realize fully solution-processed pressure sensors. Device performance analysis with structural, chemical, and electronic characterization and conductive atomic force microscopy study reveals that hybrid nanostructure based pressure sensor shows an enhanced sensitivity of higher than 500 kPa, reliability, and low power consumption with a wide range of pressure sensing. Nano-/micro-hierarchical structures are also designed by combining hybrid nanostructures with conventional microstructures, exhibiting further enhanced sensing range and achieving a record sensitivity of 2.72 × 10 kPa. Finally, all-solution-processed pressure sensor arrays with high pixel density, capable of detecting delicate signals with high spatial selectivity much better than the human tactile threshold, are introduced.

摘要

随着人们对用于电子皮肤的可穿戴触觉压力传感器的兴趣增加,已经积极开展了研究工作,以制造纳米结构来实现高灵敏度。然而,仍然存在一些局限性,例如使用昂贵设备的复杂制造工艺。在此,展示了利用纳米晶体 (NC) 开发金字塔状金属/绝缘体混合纳米结构的简单无光刻技术。用配体交换和未交换的银 NC 薄膜分别作为金属和绝缘组件。通过化学工程处理每个 NC 层的界面,创建不连续的绝缘层,即用于提高灵敏度的间隔物,最终实现完全溶液处理的压力传感器。通过结构、化学和电子特性的器件性能分析和导电原子力显微镜研究表明,基于混合纳米结构的压力传感器表现出高于 500kPa 的超高灵敏度、可靠性和低功耗,以及宽压力感应范围。还通过将混合纳米结构与传统微结构相结合来设计纳米/微分层结构,从而进一步提高了传感范围,并实现了 2.72×10 kPa 的创纪录灵敏度。最后,引入了具有高像素密度的全溶液处理压力传感器阵列,能够以比人类触觉阈值高得多的空间选择性检测到精细信号。

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