无偏置充电式环形 CMUT 麦克风：集总元件建模与性能。
Unbiased Charged Circular CMUT Microphone: Lumped-Element Modeling and Performance.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2018 Jan;65(1):60-71. doi: 10.1109/TUFFC.2017.2773490.
An energy-consistent lumped-element equivalent circuit model for charged circular capacitive micromachined ultrasonic transducer (CMUT) cell is derived and presented. It is analytically shown and experimentally verified that a series dc voltage source at the electrical terminals is sufficient to model the charging in CMUT. A model-based method for determining this potential from impedance measurements at low bias voltages is presented. The model is validated experimentally using an airborne CMUT, which resonates at 103 kHz. Impedance measurements, reception measurements at resonance and off-resonance, and the transient response of the CMUT are compared with the model predictions.
提出并推导了一种用于充电圆型电容式微机械超声换能器 (CMUT) 单元的能量一致集总元件等效电路模型。分析和实验均证实，在电端施加串联直流电压源足以对 CMUT 的充电过程进行建模。本文提出了一种基于模型的方法，可通过在低偏置电压下进行阻抗测量来确定该电势。采用工作在 103 kHz 的机载 CMUT 对模型进行了实验验证。对 CMUT 的阻抗测量、共振和非共振时的接收测量以及瞬态响应与模型预测进行了比较。
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