Kuo Chin-Guo, Chen Jung-Hsuan, Chao Yi-Chieh, Chen Po-Lin
Department of Industrial Education, National Taiwan Normal University, 162, Sec.1, Heping E. Rd., Taipei 10610, Taiwan.
Sensors (Basel). 2017 Dec 25;18(1):37. doi: 10.3390/s18010037.
In this study, an organic-inorganic semiconductor gas sensor was fabricated to detect ammonia gas. An inorganic semiconductor was a zinc oxide (ZnO) nanowire array produced by atomic layer deposition (ALD) while an organic material was a p-type semiconductor, poly(3-hexylthiophene) (P3HT). P3HT was suitable for the gas sensing application due to its high hole mobility, good stability, and good electrical conductivity. In this work, P3HT was coated on the zinc oxide nanowires by the spin coating to form an organic-inorganic heterogeneous interface of the gas sensor for detecting ammonia gas. The thicknesses of the P3HT were around 462 nm, 397 nm, and 277 nm when the speeds of the spin coating were 4000 rpm, 5000 rpm, and 6000 rpm, respectively. The electrical properties and sensing characteristics of the gas sensing device at room temperature were evaluated by Hall effect measurement and the sensitivity of detecting ammonia gas. The results of Hall effect measurement for the P3HT-ZnO nanowires semiconductor with 462 nm P3HT film showed that the carrier concentration and the mobility were 2.7 × 10 cm and 24.7 cm²∙V∙s respectively. The gas sensing device prepared by the P3HT-ZnO nanowires semiconductor had better sensitivity than the device composed of the ZnO film and P3HT film. Additionally, this gas sensing device could reach a maximum sensitivity around 11.58 per ppm.
在本研究中,制备了一种有机-无机半导体气体传感器用于检测氨气。无机半导体是通过原子层沉积(ALD)制备的氧化锌(ZnO)纳米线阵列,而有机材料是p型半导体聚(3-己基噻吩)(P3HT)。P3HT因其高空穴迁移率、良好的稳定性和良好的导电性而适用于气体传感应用。在这项工作中,通过旋涂将P3HT涂覆在氧化锌纳米线上,以形成用于检测氨气的气体传感器的有机-无机异质界面。当旋涂速度分别为4000 rpm、5000 rpm和6000 rpm时,P3HT的厚度分别约为462 nm、397 nm和277 nm。通过霍尔效应测量和检测氨气的灵敏度评估了该气体传感装置在室温下的电学性能和传感特性。对于具有462 nm P3HT薄膜的P3HT-ZnO纳米线半导体,霍尔效应测量结果表明载流子浓度和迁移率分别为2.7×10 cm和24.7 cm²∙V∙s。由P3HT-ZnO纳米线半导体制备的气体传感装置比由ZnO薄膜和P3HT薄膜组成的装置具有更好的灵敏度。此外,该气体传感装置在每ppm左右可达到最大灵敏度约11.58。