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通过三维直接激光写入制备的宽带近红外减反射涂层。

Broadband near-infrared antireflection coatings fabricated by three-dimensional direct laser writing.

作者信息

Li Y, Fullager D B, Angelbello E, Childers D, Boreman G, Hofmann T

出版信息

Opt Lett. 2018 Jan 15;43(2):239-242. doi: 10.1364/OL.43.000239.

DOI:10.1364/OL.43.000239
PMID:29328249
Abstract

Three-dimensional direct laser writing via two-photon polymerization is used to fabricate anti-reflective structured surfaces (ARSSs) composed of subwavelength conicoid features optimized to operate over a wide bandwidth in the near-infrared range from 3700  cm to 6600  cm (2.7-1.52 μm). Analytic Bruggemann effective medium calculations are used to predict nominal geometric parameters such as the fill factor of the constitutive conicoid features of the anti-reflective structured surfaces (ARSSs) presented here. The performance of the ARSSs was investigated experimentally using infrared reflection and transmission measurements. An enhancement of the transmittance by 1.35%-2.14% over a broadband spectral range from 3700  cm to 6600  cm (2.7-1.52 μm) was achieved. We further report on finite-element-based reflection and transmission data using three-dimensional (3D) model geometries for comparison. A good agreement between experimental results and the finite-element-based numerical analysis is observed once as-fabricated deviations from the nominal conicoid forms are included in the model. 3D direct laser writing is demonstrated here as an efficient method for the fabrication and optimization of ARSSs designed for the infrared spectral range.

摘要

通过双光子聚合进行的三维直接激光写入用于制造抗反射结构化表面(ARSS),该表面由亚波长圆锥体特征组成,这些特征经过优化,可在3700 cm至6600 cm(2.7 - 1.52μm)的近红外范围内的宽带中运行。这里使用解析布鲁格曼有效介质计算来预测名义几何参数,例如本文中提出的抗反射结构化表面(ARSS)的本构圆锥体特征的填充因子。使用红外反射和透射测量对ARSS的性能进行了实验研究。在3700 cm至6600 cm(2.7 - 1.52μm)的宽带光谱范围内,透过率提高了1.35% - 2.14%。我们还报告了使用三维(3D)模型几何结构进行有限元反射和透射数据的比较。一旦在模型中纳入与名义圆锥体形式的制造偏差,就会观察到实验结果与基于有限元的数值分析之间的良好一致性。本文展示了三维直接激光写入是一种用于制造和优化针对红外光谱范围设计的ARSS的有效方法。

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