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使用钨靶可改善溅射阴影。

Sputter shadowing improved by using a tungsten target.

作者信息

Colquhoun W R, Cassimeris L U

出版信息

J Ultrastruct Res. 1985 May;91(2):138-48. doi: 10.1016/0889-1605(85)90065-5.

Abstract

This work builds upon a previous paper (W. Colquhoun, 1984, J. Ultrastruct. Res. 87, 97) in which a sputter shadowing device was briefly described. The device allowed TEM specimens to be shadowed in a conventional sputter coater. Images obtained by sputter shadowing with a standard Au/Pd target were of good quality but were slightly inferior to the best that could be obtained by e--beam evaporation of tungsten. Here we show that construction and use of a tungsten target greatly improves the quality of the sputter shadowed deposit. Images of DNA and ribosomal subunits contrasted by sputter shadowing with tungsten are shown. The DNA images indicate that sputter shadowing with tungsten is a gentle contrasting technique. The sputter shadowed images of the 30 S ribosomal subunits show the major features of the particle revealed by evaporation shadowing using the most sophisticated of methods in that technology. Advantages of sputter shadowing are discussed and a rationale for the improved grain obtained by sputtering tungsten is suggested.

摘要

本研究基于之前的一篇论文(W. 科尔库洪,1984年,《超微结构研究杂志》87卷,97页),该论文简要描述了一种溅射镀膜装置。该装置可使透射电镜标本在传统的溅射镀膜机中进行镀膜。用标准金/钯靶进行溅射镀膜获得的图像质量良好,但略逊于用钨进行电子束蒸发所能获得的最佳图像。在此我们表明,钨靶的构建和使用极大地提高了溅射镀膜沉积物的质量。展示了用钨进行溅射镀膜对比的DNA和核糖体亚基的图像。DNA图像表明,用钨进行溅射镀膜是一种温和的对比技术。30S核糖体亚基的溅射镀膜图像显示了通过该技术中最复杂的方法进行蒸发镀膜所揭示的颗粒的主要特征。讨论了溅射镀膜的优点,并提出了溅射钨获得改进颗粒的原理。

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