Chen Dianzhong, Liu Xiaowei, Zhang Haifeng, Li Hai, Weng Rui, Li Ling, Rong Wanting, Zhang Zhongzhao
MEMS Center, Harbin Institute of Technology, Harbin 150001, China.
Center for Integrated Spintronic Devices, Hangzhou Dianzi University, Hangzhou 310018, China.
Sensors (Basel). 2018 Jan 31;18(2):415. doi: 10.3390/s18020415.
Stable rotor levitation is a challenge for rotational gyroscopes (magnetically suspended gyroscopes (MSG) and electrostatically suspended gyroscopes (ESG)) with a ring- or disk-shaped rotor, which restricts further improvement of gyroscope performance. In addition, complicated pick-up circuits and feedback control electronics propose high requirement on fabrication technology. In the proposed gyroscope, a ball-disk shaped rotor is supported by a water-film bearing, formed by centrifugal force to deionized water at the cavity of the lower supporting pillar. Water-film bearing provides stable mechanical support, without the need for complicated electronics and control system for rotor suspension. To decrease sliding friction between the rotor ball and the water-film bearing, a supherhydrophobic surface (SHS) with nano-structures is fabricated on the rotor ball, resulting in a rated spinning speed increase of 12.4% (under the same driving current). Rotor is actuated by the driving scheme of brushless direct current motor (BLDCM). Interaction between the magnetized rotor and the magnetic-conducted stator produces a sinusoidal rotor restoring torque, amplitude of which is proportional to the rotor deflection angle inherently. Utilization of this magnetic restoring effect avoids adding of a high amplitude voltage for electrostatic feedback, which may cause air breakdown. Two differential capacitance pairs are utilized to measure input angular speeds at perpendicular directions of the rotor plane. The bias stability of the fabricated gyroscope is as low as 0.5°/h.
对于带有环形或盘形转子的旋转陀螺仪(磁悬浮陀螺仪(MSG)和静电悬浮陀螺仪(ESG))而言,稳定的转子悬浮是一项挑战,这限制了陀螺仪性能的进一步提升。此外,复杂的拾取电路和反馈控制电子设备对制造技术提出了很高的要求。在所提出的陀螺仪中,一个球盘形转子由水膜轴承支撑,该水膜轴承是由去离子水在下部支撑柱腔体内因离心力形成的。水膜轴承提供稳定的机械支撑,无需用于转子悬浮的复杂电子设备和控制系统。为了减少转子球与水膜轴承之间的滑动摩擦,在转子球上制造了具有纳米结构的超疏水表面(SHS),使得额定转速提高了12.4%(在相同驱动电流下)。转子由无刷直流电机(BLDCM)的驱动方案驱动。磁化转子与导磁定子之间的相互作用产生正弦形的转子恢复转矩,其幅度本质上与转子偏转角成正比。利用这种磁恢复效应避免了为静电反馈添加高幅值电压,否则可能会导致空气击穿。利用两对差分电容来测量转子平面垂直方向上的输入角速度。所制造的陀螺仪的偏置稳定性低至0.5°/h。