Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Sensors (Basel). 2018 Nov 12;18(11):3901. doi: 10.3390/s18113901.
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate.
高速旋转转子陀螺仪的旋转速度会对角速度传感器的性能产生重大影响，例如标度因数、分辨率、测量范围和偏置稳定性。本文介绍了微机电系统（MEMS）陀螺仪中旋转速度对性能指标的影响，其中自由旋转的转子通过静电悬浮在真空中的真空腔中，并用作双轴角速度传感器。推导了这种旋转转子陀螺仪的标度因数和测量范围的理论模型。实验结果表明，在不同旋转速度设置下测量的标度因数与理论预测吻合较好。为了分离陀螺仪输出上旋转控制回路的干扰分量，提出了一种通过在不同旋转速度下操作陀螺仪的测试策略。原型陀螺仪的实验结果表明，旋转控制回路产生的平方驱动电压与陀螺仪输出的噪声大致成正比。进一步研究表明，通过将陀螺仪转子以最佳旋转速度运行，可以实现这种旋转转子陀螺仪的性能改进。
