Wang Yi, Suyolcu Y Eren, Salzberger Ute, Hahn Kersten, Srot Vesna, Sigle Wilfried, van Aken Peter A
Stuttgart Center for Electron Microscopy, Max Planck Institute for Solid State Research, Stuttgart, Germany.
Microscopy (Oxf). 2018 Mar 1;67(suppl_1):i114-i122. doi: 10.1093/jmicro/dfy002.
Specimen and stage drift as well as scan distortions can lead to a mismatch between true and desired electron probe positions in scanning transmission electron microscopy (STEM) which can result in both linear and nonlinear distortions in the subsequent experimental images. This problem is intensified in STEM spectrum and diffraction imaging techniques owing to the extended dwell times (pixel exposure time) as compared to conventional STEM imaging. As a consequence, these image distortions become more severe in STEM spectrum/diffraction imaging. This becomes visible as expansion, compression and/or shearing of the crystal lattice, and can even prohibit atomic resolution and thus limits the interpretability of the results. Here, we report a software tool for post-correcting the linear and nonlinear image distortions of atomically resolved 3D spectrum imaging as well as 4D diffraction imaging. This tool improves the interpretability of distorted STEM spectrum/diffraction imaging data.
在扫描透射电子显微镜（STEM）中，样品和载物台漂移以及扫描畸变会导致真实电子探针位置与期望位置不匹配，进而在后续实验图像中产生线性和非线性畸变。与传统STEM成像相比，STEM光谱和衍射成像技术由于驻留时间（像素曝光时间）延长，这一问题更加突出。因此，这些图像畸变在STEM光谱/衍射成像中变得更加严重。这表现为晶格的膨胀、压缩和/或剪切，甚至可能妨碍原子分辨率，从而限制了结果的可解释性。在此，我们报告了一种软件工具，用于对原子分辨的3D光谱成像以及4D衍射成像的线性和非线性图像畸变进行后期校正。该工具提高了STEM光谱/衍射成像数据畸变后的可解释性。
