Luo Songjie, Sasaki Osami, Chen Ziyang, Choi Samuel, Pu Jixiong
Appl Opt. 2018 Feb 1;57(4):894-899. doi: 10.1364/AO.57.000894.
A new signal processing is proposed in which the dispersion phase is not subtracted from the detected spectral phase distribution. The linear and bias components in the spectral phase distribution are used to calculate the complex-valued interference signal (CVIS). The simulations verify that the dispersion phase generates an inclination in the measured surface profile along one direction in which the magnitude of the dispersion phase changes linearly. The simulations also show that the position of zero phase nearest the position of amplitude maximum in the CVIS almost does not change due to the bias component, although the random phase noise contained in the interference signal changes the slope of the linear component. Measured surface profiles show that the new signal processing achieves highly accurate measurement by the CVIS.
提出了一种新的信号处理方法，其中不从检测到的光谱相位分布中减去色散相位。利用光谱相位分布中的线性和偏置分量来计算复值干涉信号（CVIS）。仿真结果验证了色散相位会在测量表面轮廓中沿色散相位大小线性变化的一个方向产生倾斜。仿真还表明，尽管干涉信号中包含的随机相位噪声会改变线性分量的斜率，但CVIS中最接近幅度最大值位置的零相位位置几乎不会因偏置分量而改变。实测表面轮廓表明，这种新的信号处理方法通过CVIS实现了高精度测量。
