Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China.
Nanoscale. 2018 Apr 5;10(14):6261-6269. doi: 10.1039/c8nr00341f.
Silicon carbide (SiC) is widely used in harsh environments and under extreme conditions, including at high-power, high-temperature, high-current, high-voltage and high-frequency. The rebonding and self-matching of stack faults (SFs) is highly desirable to avoid catastrophic failure for SiC devices, especially for specific applications in the aerospace and nuclear power industries. In this study, a novel approach was developed using an eyebrow hair to pick up and transfer nanowires (NWs), in order to obtain in situ transmission electron microscope (TEM) images of the rebonding and self-matching of SFs at atomic resolution. During rebonding and healing, the electron beam was shut off. Rebonding on the fractured surfaces of monocrystalline and amorphous SiC NWs was observed by in situ TEM at room temperature. The fracture strength was 1.7 GPa after crack-healing, restoring 12.9% of that of a single crystal NW. Partial recrystallization along the <111> orientation and the self-matching of SFs are responsible for the rebonding of the monocrystalline NW. In comparison, the fracture strengths were 6.7 and 5.5 GPa for the first and second rebonding, respectively recovering 67% and 55% of that of an amorphous NW. Atomic diffusion contributed enormously to the rebonding on fractured surfaces of an amorphous NW, resulting in a healed surface consisting of an amorphous phase and crystallites. This rebonding function provides new insight into the fabrication of high-performance SiC devices for the aerospace, optoelectronic and semiconductor industries.
碳化硅(SiC)广泛应用于恶劣环境和极端条件下,包括高功率、高温、大电流、高电压和高频等环境。对于 SiC 器件,尤其是在航空航天和核电等特定应用中,避免灾难性故障的理想方法是堆叠故障(SFs)的再键合和自匹配。在这项研究中,提出了一种使用眉毛毛发拾取和传输纳米线(NWs)的新方法,以便在原子分辨率下获得 SFs 再键合和自匹配的原位透射电子显微镜(TEM)图像。在再键合和愈合过程中,电子束被关闭。在室温下通过原位 TEM 观察单晶和非晶 SiC NWs 的断裂表面的再键合。在裂纹愈合后,断裂强度为 1.7 GPa,恢复了单晶 NW 的 12.9%。部分沿<111>取向的再结晶和 SFs 的自匹配是单晶 NW 再键合的原因。相比之下,第一次和第二次再键合的断裂强度分别为 6.7 和 5.5 GPa,分别恢复了非晶 NW 的 67%和 55%。原子扩散对非晶 NW 断裂表面的再键合有很大贡献,导致愈合表面由非晶相和晶相组成。这种再键合功能为航空航天、光电子和半导体行业的高性能 SiC 器件制造提供了新的思路。