用于测量光纤外腔法布里-珀罗干涉仪的五步相移白光干涉测量法。

Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers.

作者信息

Gao Hongchun, Jiang Yi, Zhang Liuchao, Jiang Lan

出版信息

Appl Opt. 2018 Feb 10;57(5):1168-1173. doi: 10.1364/AO.57.001168.

DOI:10.1364/AO.57.001168

Abstract

Five-step phase-shifting white-light interferometry is presented for interrogating the absolute cavity length of the fiber optic extrinsic Fabry-Perot interferometer (EFPI). It combines ideas of phase-shifting interferometry and white-light interferometry (WLI) to extend the measurement range of fiber optic WLI. Five sub-interferograms intercepted from the white-light optical spectrum are used to recover the optical path difference (OPD) of the EFPI. This method is demonstrated to interrogate a wider range of OPD. The experimental results show that the measurement resolution ranges from 0.5 μm to 5 μm with cavity length ranges from 16 μm to 12,402 μm, and it has a great advantage in measuring EFPIs with short cavity lengths.

摘要

提出了一种五步相移白光干涉测量法，用于检测光纤外腔法布里-珀罗干涉仪（EFPI）的绝对腔长。它结合了相移干涉测量法和白光干涉测量法（WLI）的理念，以扩展光纤白光干涉测量法的测量范围。从白光光谱中截取的五张子干涉图用于恢复EFPI的光程差（OPD）。该方法被证明可检测更宽范围的光程差。实验结果表明，当腔长范围为16μm至12,402μm时，测量分辨率范围为0.5μm至5μm，并且在测量短腔长的EFPI时具有很大优势。